The IAS-M300 series chemical concentration analyzer is an advanced instrument designed by our company for critical cleaning and etching processes. It is primarily used in wet process applications within high-tech industries such as semiconductors, FPD, and solar energy. The equipment enables real-time monitoring of chemical concentrations in wet etching, cleaning, and photoresist removal processes. It facilitates closed-loop quantitative control of chemical concentrations, allowing operators to promptly understand concentration changes. This effectively reduces unnecessary chemical consumption and minimizes occurrences of abnormal cleaning.
Product Features
Rapid and accurate analysis of chemical concentrations, effectively enabling closed-loop control
Front-End Fiber Connection with Enhanced Real-Time Detection Performance
Capable of meeting complex multi-component analysis requirements
Replaceable PFA Sampling Tube for Effortless Installation
Years of spectrometer design experience combined with mature modeling algorithms, ensuring outstanding stability and repeatability
Applications
It is primarily used in wet process applications within high-tech industries such as semiconductors, FPD, and solar energy. The equipment enables real-time monitoring of chemical concentrations in wet etching, cleaning, and photoresist removal processes.
Technical Specifications
Model | IAS-M300 Series |
Measurement sample | 9058/960H |
Measurement principle | Spectral Absorption Method |
Measurement range | 9058,NH₃:0-2%,H2O:25-45%,960H,Ammonia:0-2%,H2O:15-36%,Fluoride:0-2% For additional measurement ranges,contact IAS. |
Reproducibility | 9058,NH₃:±0.25%,H2O:±0.3%,960H,Ammonia:±0.25%,H2O:±0.3%,Fluoride:±0.25% |
Chemical pressure | <0.20 MPa |
Chemical temperature | 20-45℃ |
Wetted materials | PFA |
Ambient temperature | Host:20-30℃ Measurement Unit:20-35℃ Avoid sudden ambient temperature changes(<±1℃/hour). |
Ambient humidity | <70%(non-condensing) |
Operation panel | 1)Chemical concentration detection. 2)Alarm display for chemical parameters:upper-upper limit(HH),upper limit(H), lower-lower limit(LL),lower limit(L). 3)Configurable alarm thresholds for chemical parameters:HH,H,LL,L. 4)Error code reporting. |
Communication interface | RS232,RS485,Ethernet,parallel port,analog output (4-20mA) |
Analog output | 1)First component and measured value(%) 2)Second component and measured value(%)(load resistance<500Ω,current error≤0.2%) |
Serial inputt | 1)Measurement data output request. 2)Error code output request. 3Start/stop detection(default:start). 4)Selection of chemical for detection. 5 Setting upper and lower limits for first and second components(HH/H/L/LL). |
Serial output | 1)Measurement data(serial number,allcomponent values). 2)Error codes. 3)Chemical type and instrument status. 4)Upper and lower limits for first and second components(HH/H/L/LL). |
Parallel input | Input voltage of 12 to 30V DC obtained via isolated optocoupler. 1)Enable/disable parallel port concentration limit alerts. 2)Chemical selection for detection. |
Parallel output | Transistor output(NPN)via isolated optocoupler:Maximum current when powered:5mA DC (no internal protection resistor)Maximum voltage when unpowered:30V DC 1)First and second component limit alarms(HH/H/L/LL). 2)Instrument errors. 3)Measurement status. 4)Chemical type detection. 5)Warnings. 6)Background correction status. |
Power supply | 24V DC±10%,~20W |
Dimension | Host:202(W)×272(D)×176(H)mm Measurement Unit:141(W)×110(D)×162(H)mm |
Weight | Host:~5.9 kg Measuremeňt Unit:~0.8kg(Customizable according to on-site working conditions) |
Connection pipe size | Chemical Path:External piping(3/4 inch) Gas Path:4mm O.D.quick-connect plug |
Slanting angle at installation | Host:±1°.Measurement Unit:Ensure Chemical flows in from bottom and out from top after connection. |
Optical fiber | Fiber Length:10m bending radius:R200mm |

9058, 960H
ASTM E1655-05 Standard Practices for Infrared Multivariate Quantitative Analysis
ASTM E168-06 Standard Practices for General Techniques of Infrared Quantitative Analysis
ASTM E1790-04 Standard Practice for Near Infrared Qualitative Analysis
39-00 Near-Infrared Methods-Guidelines for Model Development and Maintenance
39-10 Near-Infrared Reflectance Method for Protein Determination in Small Grains
39-11 Near-Infrared Reflectance Method for Protein Determination in Wheat Flour
39-20 Near-Infrared Reflectance Method for Protein and Oil Determination in Soybeans
39-21 Near-Infrared Reflectance Method for Whole-Grain Analysis in Soybeans
39-25 Near-Infrared Reflectance Method for Protein Content in Whole-Grain Wheat
39-70A Near-Infrared Reflectance Method for Hardness Determination in Wheat
ICC-159 Determination of Protein by Near Infrared Reflectance(NIR)Spectroscopy