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IAS-M300 Chemical Concentration Monitor

The IAS-M300 series chemical concentration analyzer is an advanced instrument designed by our company for critical cleaning and etching processes. It is primarily used in wet process applications within high-tech industries such as semiconductors, FPD, and solar energy. The equipment enables real-time monitoring of chemical concentrations in wet etching, cleaning, and photoresist removal processes. It facilitates closed-loop quantitative control of chemical concentrations, allowing operators to promptly understand concentration changes. This effectively reduces unnecessary chemical consumption and minimizes occurrences of abnormal cleaning.

Product Features

  • Rapid and accurate analysis of chemical concentrations, effectively enabling closed-loop control

  • Front-End Fiber Connection with Enhanced Real-Time Detection Performance

  • Capable of meeting complex multi-component analysis requirements

  • Replaceable PFA Sampling Tube for Effortless Installation

  • Years of spectrometer design experience combined with mature modeling algorithms, ensuring outstanding stability and repeatability

Applications

It is primarily used in wet process applications within high-tech industries such as semiconductors, FPD, and solar energy. The equipment enables real-time monitoring of chemical concentrations in wet etching, cleaning, and photoresist removal processes. 


Technical Specifications

Model

IAS-M300 Series

Measurement sample

9058/960H

Measurement principle

Spectral Absorption Method

Measurement range

9058,NH₃:0-2%,H2O:25-45%,960H,Ammonia:0-2%,H2O:15-36%,Fluoride:0-2% For additional measurement ranges,contact IAS.

Reproducibility

9058,NH₃:±0.25%,H2O:±0.3%,960H,Ammonia:±0.25%,H2O:±0.3%,Fluoride:±0.25%

Chemical pressure

<0.20 MPa

Chemical temperature

20-45℃

Wetted materials

PFA

Ambient temperature

Host:20-30℃

Measurement Unit:20-35℃

Avoid sudden ambient temperature changes(<±1℃/hour).

Ambient humidity

<70%(non-condensing)

 

Operation panel

1)Chemical concentration detection.

2)Alarm display for chemical parameters:upper-upper limit(HH),upper limit(H), lower-lower limit(LL),lower limit(L).

3)Configurable alarm thresholds for chemical parameters:HH,H,LL,L.

4)Error code reporting.

Communication interface

RS232,RS485,Ethernet,parallel port,analog output (4-20mA)

Analog output

1)First component and measured value(%)

2)Second component and measured value(%)(load resistance<500Ω,current error≤0.2%)

 

Serial inputt

1)Measurement data output request.

2)Error code output request.

3Start/stop detection(default:start).

4)Selection of chemical for detection.

5 Setting upper and lower limits for first and second components(HH/H/L/LL).

 

Serial output

1)Measurement data(serial number,allcomponent values).

2)Error codes.

3)Chemical type and instrument status.

4)Upper and lower limits for first and second components(HH/H/L/LL).

Parallel input

Input voltage of 12 to 30V DC obtained via isolated optocoupler.

1)Enable/disable parallel port concentration limit alerts.

2)Chemical selection for detection.

 

 

Parallel output

Transistor output(NPN)via isolated optocoupler:Maximum current when powered:5mA DC (no internal protection resistor)Maximum voltage when unpowered:30V DC

1)First and second component limit alarms(HH/H/L/LL).

2)Instrument errors.

3)Measurement status.

4)Chemical type detection.

5)Warnings.

6)Background correction status.

Power supply

24V DC±10%,~20W

Dimension

Host:202(W)×272(D)×176(H)mm

Measurement Unit:141(W)×110(D)×162(H)mm

Weight

Host:~5.9 kg

Measuremeňt Unit:~0.8kg(Customizable according to on-site working conditions)

Connection pipe size

Chemical Path:External piping(3/4 inch)

Gas Path:4mm O.D.quick-connect plug

Slanting angle at installation

Host:±1°.Measurement

Unit:Ensure Chemical flows in from bottom and out from top after connection.

Optical fiber

Fiber Length:10m

bending radius:R200mm

Applications:

9058, 960H

Develop reference standards:


  • ASTM E1655-05 Standard Practices for Infrared Multivariate Quantitative Analysis

  • ASTM E168-06 Standard Practices for General Techniques of Infrared Quantitative Analysis

  • ASTM E1790-04 Standard Practice for Near Infrared Qualitative Analysis

  • 39-00 Near-Infrared Methods-Guidelines for Model Development and Maintenance

  • 39-10 Near-Infrared Reflectance Method for Protein Determination in Small Grains

  • 39-11 Near-Infrared Reflectance Method for Protein Determination in Wheat Flour

  • 39-20 Near-Infrared Reflectance Method for Protein and Oil Determination in Soybeans

  • 39-21 Near-Infrared Reflectance Method for Whole-Grain Analysis in Soybeans

  • 39-25 Near-Infrared Reflectance Method for Protein Content in Whole-Grain Wheat

  • 39-70A Near-Infrared Reflectance Method for Hardness Determination in Wheat

  • ICC-159 Determination of Protein by Near Infrared Reflectance(NIR)Spectroscopy


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