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IAS-M100 Chemical Concentration Monitor

The IAS-M100 series chemical concentration analyzer is an advanced instrument designed by our company for critical cleaning and etching processes. It is primarily used in wet process applications within high-tech industries such as semiconductors, FPD, and solar energy. The equipment enables real-time monitoring of chemical concentrations in wet etching, cleaning, and photoresist removal processes. It facilitates closed-loop quantitative control of chemical concentrations, allowing operators to promptly understand concentration changes. This eﬀectively reduces unnecessary chemical consumption and minimizes occurrences of abnormal cleaning.

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Product Features

➤ Rapid and accurate analysis of chemical concentrations, eﬀectively enabling closed-loop control.

➤ Equipped with a 7-inch an excellent interaction experience

➤ Capable of meeting complex multi-component analysis requirements

➤ Unique liquid path design eﬀectively eliminates the impact of bubbles on analysis

➤ Years of spectrometer design experience combined with mature modeling algorithms, ensuring outstanding stability and repeatability

Applications

It is primarily used in wet process applications within high-tech industries such as semiconductors, FPD, and solar energy. The equipment enables real-time monitoring of chemical concentrations in wet etching, cleaning, and photoresist removal processes.

Technical Specifications

Measurement Principle	Spectral Absorption Method
SC1	Concentration Range 1: NH3:0%-5%,H2O2:0%-10%,H2O:85%-100% Accuracy:NH3 :±0.25%,H2O2:±0.3%,H2O:±1.5%	Flow Rate: 20-40ml/min Temperature: 20-80
	Concentration Range 2: NH3:0%-2%,H2O2:0%-2%,H2O:96%-100% Accuracy: ±0.1%,H2O2:±0.2%,H2O:±1.5%	Flow Rate: 20-40ml/min Temperature: 20-80℃
SC2	Concentration Range: HCl:0%-2%,H2O2:0%-2%,H2O:96%-100% Accuracy: HCl:±0.15%,H2O2:±0.15%,H2O:±1.5%	Flow Rate: 20-40ml/min Temperature: 20-80℃
HFN	Concentration Range: HF:0%-1%,HNO3:66%-70%,H2O:27.5%-34.0% Accuracy: HF:±0.08%,HNO3:±0.4%,H2O:±0.5%	Flow Rate: 20-40ml/min Temperature: 20-40℃
SPM	Concentration Range: H2SO4:70.0%-96.0%，H2O2：0.0%-5.0%， H2O：4.0%-30.0% Accuracy: H2SO4:±0.5%，H2O2：±0.3%，H2O：±1.5%，	Flow Rate: 20-60ml/min Temperature: 20-30°C (without cooling), 20-130°C (water-cooled)
BOE	Concentration Range: HF:1-8%，NH4F:10-35%, H2O: 57-89% Accuracy: HF: ±0.5%, NH4F: ±0.3%, H2O: ±1.5%	Flow Rate: 20-40 ml/min Temperature: 20-60°C
Chemical Pressure	0.1-0.2Mpa
Air Pressure	0.3-0.5Mpa
Measurement Cycle	Approximately 3 seconds per cycle
Equipment Temperature	20-25°C, avoid sudden environmental temperature changes
Operation panel	1. Chemical concentration detection 2. Alarm information display: Upper-upper limit, upper limit, lower-lower limit, lower limit of chemical detection metrics 3. Alarm threshold settings: Upper-upper limit, upper limit, lower-lower limit, lower limit of chemical detection metrics
Communication interface	RS232, RS485, Ethernet, parallel port, analog
Analog output	(4-20mA) 1. First component and measured value (%) 2. Second component and measured value (%) (load resistance <500Ω, current error within 0.2%)
Power supply	24VDC ±10%, approximately 40W
Dimension	285(W)336(D)239(H)mm
Weight	Approximately 12 kg
Connection pipe size	External piping (1/4 inch), internal piping (1/8 inch)
Pipe connection	Pillar Super Type

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Industry Applications

Semiconductor Process Monitoring

To address the needs of chemical wet process liquid concentration management, we have developed a high-precision chemical liquid concentration meter." This device uses near-infrared spectroscopy absorption and electrochemical principles to complete concentration measurements of common etchants/cleaners such as HF, H2SO4, TMAH, and others in seconds, with an accuracy of ±0.01%. The device can operate continuously in high-temperature strong acid environments (resistant to PFA materials). It features built-in compensation algorithms to eliminate measurement errors caused by temperature and bubble interference, enabling real-time data transmission with factory central control systems, and the product has passed SEMI S2, CE, and other certifications.

Application Areas:

SC1、SC2、HFN、SPM

Develop reference standards：

ASTM E1655-05 Standard Practices for Infrared Multivariate Quantitative Analysis
ASTM E168-06 Standard Practices for General Techniques of Infrared Quantitative Analysis
ASTM E1790-04 Standard Practice for Near Infrared Qualitative Analysis
39-00 Near-Infrared Methods-Guidelines for Model Development and Maintenance
39-10 Near-Infrared Reflectance Method for Protein Determination in Small Grains
39-11 Near-Infrared Reflectance Method for Protein Determination in Wheat Flour
39-20 Near-Infrared Reflectance Method for Protein and Oil Determination in Soybeans
39-21 Near-Infrared Reflectance Method for Whole-Grain Analysis in Soybeans
39-25 Near-Infrared Reflectance Method for Protein Content in Whole-Grain Wheat
39-70A Near-Infrared Reflectance Method for Hardness Determination in Wheat
ICC-159 Determination of Protein by Near Infrared Reflectance(NIR)Spectroscopy

Cases

You Are Currently Here! > Home > Products > Semiconductor Series > IAS-M100

IAS-M100 Chemical Concentration Monitor

Industry Applications

Application Areas:

Develop reference standards：

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