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IAS-HF900 Chemical Concentration Monitor

The IAS-HF900 series HF concentration analyzer is an advanced instrument designed by our company for critical cleaning and etching processes. With the development of 65nm and 45nm devices, chemical solutions traditionally used in RCA cleaning require increasingly precise low-concentration control. The HF900 employs sensors to achieve high-precision, high-speed measurement of low-concentration hydrofluoric acid, making it ideal for single-tank and wafer cleaning applications.

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Product Features

➤ Precise measurement of low-concentration HF

High-precision measurement capability with repeatability accuracy up to ±0.5% of full scale, meeting the control demands of increasingly precise semiconductor etching processes.

➤ Multiple measurement modes with integrated temperature compensation algorithms

Temperature-compensated HF concentration measurement based on the temperature characteristics of substances. Additionally, the equipment can function as a conductivity meter, supporting low-concentration dilution control for other chemical solutions.

➤ Multi-interface compatibility design

Integrated RS-485 communication interface alongside analog interfaces, enabling real-time viewing of measurement data, querying, and modification of equipment parameters via remote communication.

Technical Specifications

Model	IAS-HF900
Measurement Method	Conductivity/Concentration Conversion Method
Electrode Coefficient	Approximately 4.99
Temperature Sensor Specifications	Platinum resistance 1000Ω/0℃ Temperature coefficient 3750ppm/℃ standard
Measurement Range	Full-Scale Measurement Range
	HF	Oppm to 20,000 ppm
	Conductivity	0mS/cm to 50.00 mS/cm
	Temperature	0℃ to 100℃
Repeatability	HF Repeatability Range:Within±0.5%of full scale 0 to 5,000 ppm:±25ppm 0 to 10,000 ppm:±50 ppm 0 to 15,000 ppm:±75 ppm 0 to 20,000 ppm:±100 ppm
Accuracy	Within ±0.5%of full scale
Signal Output	Two channels of 4-20mA,maximum load resistance:5000
Relay Output	Three relay outputs,programmable to correspond to high/low points,alarm points, cleaning points,and time relays for any channel's measured value
Communication Output	RS-485 input/output
Calibration Function	Concentration and conductivity:Calibrated based on electrode coefficient Temperature:Calibrated by comparison with a standard thermometer
Transmission Hold	Selectable between holding the previous value or an optional value (only previous value hold is available in maintenance mode)
Self-Diagnostic Function	Sensor diagnostics(temperature sensor short-circuit or disconnection) out-of-range measurement,converter errors
Temperature Compensation	User-defined temperature coefficient(reference temperature:25℃,temperature coefficient:0-3%/℃）
Temperature Compensation Range	HF:0℃ to 80℃ Conductivity:0℃to 100℃
Environmental Conditions	Temperature:-5°℃to 45℃,Relative Humidity:20%to 85%(no condensation)
Power Supply	24VDC±10%,10W(max)
Protection Structure	Indoor use,panel-mounted,panel box:ABS,terminals:PA66,panel:IP65 dust proof and waterproof
Weight	Approximately 400g
Compliance Standards	Meets relevant certification requirements,such as SEMI S2,F47,CE,UL,etc.
Compatible Sensor	IAS-HF900

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Industry Applications

Semiconductor Process Monitoring

To address the needs of chemical wet process liquid concentration management, we have developed a high-precision chemical liquid concentration meter." This device uses near-infrared spectroscopy absorption and electrochemical principles to complete concentration measurements of common etchants/cleaners such as HF, H2SO4, TMAH, and others in seconds, with an accuracy of ±0.01%. The device can operate continuously in high-temperature strong acid environments (resistant to PFA materials). It features built-in compensation algorithms to eliminate measurement errors caused by temperature and bubble interference, enabling real-time data transmission with factory central control systems, and the product has passed SEMI S2, CE, and other certifications.

Application Areas:

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Develop reference standards：

ASTM E1655-05 Standard Practices for Infrared Multivariate Quantitative Analysis
ASTM E168-06 Standard Practices for General Techniques of Infrared Quantitative Analysis
ASTM E1790-04 Standard Practice for Near Infrared Qualitative Analysis
39-00 Near-Infrared Methods-Guidelines for Model Development and Maintenance
39-10 Near-Infrared Reflectance Method for Protein Determination in Small Grains
39-11 Near-Infrared Reflectance Method for Protein Determination in Wheat Flour
39-20 Near-Infrared Reflectance Method for Protein and Oil Determination in Soybeans
39-21 Near-Infrared Reflectance Method for Whole-Grain Analysis in Soybeans
39-25 Near-Infrared Reflectance Method for Protein Content in Whole-Grain Wheat
39-70A Near-Infrared Reflectance Method for Hardness Determination in Wheat
ICC-159 Determination of Protein by Near Infrared Reflectance(NIR)Spectroscopy

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IAS-HF900 Chemical Concentration Monitor

Industry Applications

Application Areas:

Develop reference standards：

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