Semiconductor Process Monitoring

You Are Currently Here! > Home > Applications > Semiconductor Process Monitoring

Semiconductor Process Monitoring

To address the needs of chemical wet process liquid concentration management, we have developed a high-precision chemical liquid concentration meter." This device uses near-infrared spectroscopy absorption and electrochemical principles to complete concentration measurements of common etchants/cleaners such as HF, H₂SO₄, TMAH, and others in seconds, with an accuracy of ±0.01%. The device can operate continuously in high-temperature strong acid environments (resistant to PFA materials). It features built-in compensation algorithms to eliminate measurement errors caused by temperature and bubble interference, enabling real-time data transmission with factory central control systems, and the product has passed SEMI S2, CE, and other certifications.

Industry Advantages

Chip, Display, Light - Smart Control for the Future
Autonomous learning mechanism:Online calibration technology based on real-time condition data. Self-diagnosis and fault-tolerant processing of abnormal concentration fluctuations
Process coupling modeling:Integrated semiconductor process parameter compensation algorithm to match precise chemical solution control needs. Development of photovoltaic cleaning agent dynamic attenuation model to achieve precise dosage regulation.
Modular adaptation capability:Product modular design, facilitating light source replacement and maintenance; fiber-optic expandable probe system compatible with various conditions, achieving standardized I/O communication docking with mainstream cleaning equipment.
Semiconductor-grade reliable design:Multiple anti-corrosion material combination solutions to handle strong acid/strong alkali media, adapting to particle and ion precipitation requirements.
Optical technology breakthrough:Composite spectral architecture - Integration of transmission mode detection, adapting to different material containers and solution states. Self-developed optoelectronic components - Using anti-contamination optical windows and redundant optical path design to ensure long-term stability under extreme conditions

Solutions

Semiconductor Process Monitoring Available Instruments

Modular adaptation capability:

Product modular design, facilitating light source replacement and maintenance; fiber-optic expandable probe system compatible with various conditions, achieving standardized I/O communication docking with mainstream cleaning equipment.

Semiconductor-grade reliable design:

Multiple anti-corrosion material combination solutions to handle strong acid/strong alkali media, adapting to particle and ion precipitation requirements.

Optical technology breakthrough:

Composite spectral architecture - Integration of transmission mode detection, adapting to different material containers and solution states. Self-developed optoelectronic components - Using anti-contamination optical windows and redundant optical path design to ensure long-term stability under extreme conditions

Modular adaptation capability:、Semiconductor-grade reliable design:、Optical technology breakthrough:、 Available Instruments

Industry Application Cases